JPS5310845U - - Google Patents
Info
- Publication number
- JPS5310845U JPS5310845U JP9162176U JP9162176U JPS5310845U JP S5310845 U JPS5310845 U JP S5310845U JP 9162176 U JP9162176 U JP 9162176U JP 9162176 U JP9162176 U JP 9162176U JP S5310845 U JPS5310845 U JP S5310845U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Physical Vapour Deposition (AREA)
- Resistance Heating (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9162176U JPS5547869Y2 (pl) | 1976-07-12 | 1976-07-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9162176U JPS5547869Y2 (pl) | 1976-07-12 | 1976-07-12 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5310845U true JPS5310845U (pl) | 1978-01-30 |
| JPS5547869Y2 JPS5547869Y2 (pl) | 1980-11-10 |
Family
ID=28702221
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9162176U Expired JPS5547869Y2 (pl) | 1976-07-12 | 1976-07-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5547869Y2 (pl) |
-
1976
- 1976-07-12 JP JP9162176U patent/JPS5547869Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5547869Y2 (pl) | 1980-11-10 |