JPS53106680A - Vacuum depoistion apparatus - Google Patents
Vacuum depoistion apparatusInfo
- Publication number
- JPS53106680A JPS53106680A JP2158177A JP2158177A JPS53106680A JP S53106680 A JPS53106680 A JP S53106680A JP 2158177 A JP2158177 A JP 2158177A JP 2158177 A JP2158177 A JP 2158177A JP S53106680 A JPS53106680 A JP S53106680A
- Authority
- JP
- Japan
- Prior art keywords
- vacuum
- depoistion
- carbon rod
- carbon
- fine
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/26—Vacuum evaporation by resistance or inductive heating of the source
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
PURPOSE:To provide a vacuum deposition apparatus for carbon which is continuously used at a constant electric current by contacting the uncut end of a fine carbon rod of a pair of carbon rods with the other carbon rod on one axle, by pushing the fine carbon rod with a spring placed at the rear end of the fine carbon rod.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2158177A JPS53106680A (en) | 1977-03-02 | 1977-03-02 | Vacuum depoistion apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2158177A JPS53106680A (en) | 1977-03-02 | 1977-03-02 | Vacuum depoistion apparatus |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS53106680A true JPS53106680A (en) | 1978-09-16 |
Family
ID=12058994
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2158177A Pending JPS53106680A (en) | 1977-03-02 | 1977-03-02 | Vacuum depoistion apparatus |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS53106680A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005150118A (en) * | 2003-11-18 | 2005-06-09 | Unaxis Balzer Ag | Ignition device, electrical arc evaporator and processing method of workpieces |
CN110789263A (en) * | 2019-11-07 | 2020-02-14 | 安徽超文玻璃科技有限公司 | Manufacturing process and manufacturing equipment for inner and outer double-layer patterns of glass cup |
-
1977
- 1977-03-02 JP JP2158177A patent/JPS53106680A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005150118A (en) * | 2003-11-18 | 2005-06-09 | Unaxis Balzer Ag | Ignition device, electrical arc evaporator and processing method of workpieces |
CN110789263A (en) * | 2019-11-07 | 2020-02-14 | 安徽超文玻璃科技有限公司 | Manufacturing process and manufacturing equipment for inner and outer double-layer patterns of glass cup |
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