JPS53105908U - - Google Patents

Info

Publication number
JPS53105908U
JPS53105908U JP1003277U JP1003277U JPS53105908U JP S53105908 U JPS53105908 U JP S53105908U JP 1003277 U JP1003277 U JP 1003277U JP 1003277 U JP1003277 U JP 1003277U JP S53105908 U JPS53105908 U JP S53105908U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1003277U
Other languages
Japanese (ja)
Other versions
JPS6128942Y2 (cg-RX-API-DMAC7.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1003277U priority Critical patent/JPS6128942Y2/ja
Publication of JPS53105908U publication Critical patent/JPS53105908U/ja
Application granted granted Critical
Publication of JPS6128942Y2 publication Critical patent/JPS6128942Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Compressor (AREA)
  • Self-Closing Valves And Venting Or Aerating Valves (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP1003277U 1977-02-01 1977-02-01 Expired JPS6128942Y2 (cg-RX-API-DMAC7.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1003277U JPS6128942Y2 (cg-RX-API-DMAC7.html) 1977-02-01 1977-02-01

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1003277U JPS6128942Y2 (cg-RX-API-DMAC7.html) 1977-02-01 1977-02-01

Publications (2)

Publication Number Publication Date
JPS53105908U true JPS53105908U (cg-RX-API-DMAC7.html) 1978-08-25
JPS6128942Y2 JPS6128942Y2 (cg-RX-API-DMAC7.html) 1986-08-27

Family

ID=28821878

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1003277U Expired JPS6128942Y2 (cg-RX-API-DMAC7.html) 1977-02-01 1977-02-01

Country Status (1)

Country Link
JP (1) JPS6128942Y2 (cg-RX-API-DMAC7.html)

Also Published As

Publication number Publication date
JPS6128942Y2 (cg-RX-API-DMAC7.html) 1986-08-27

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