JPS531036B2 - - Google Patents
Info
- Publication number
- JPS531036B2 JPS531036B2 JP9153672A JP9153672A JPS531036B2 JP S531036 B2 JPS531036 B2 JP S531036B2 JP 9153672 A JP9153672 A JP 9153672A JP 9153672 A JP9153672 A JP 9153672A JP S531036 B2 JPS531036 B2 JP S531036B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9153672A JPS531036B2 (https=) | 1972-09-11 | 1972-09-11 | |
| DE2249144A DE2249144C3 (de) | 1971-10-06 | 1972-10-06 | 11.09.72 Japan 47-91536 Vorrichtung zum epitaktischen Aufwachsen einer Halbleiterschicht auf ein Substrat |
| NL7213557A NL7213557A (https=) | 1971-10-06 | 1972-10-06 | |
| US295554A US3896765A (en) | 1971-10-06 | 1972-10-06 | Apparatus for liquid-phase epitaxial growth |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9153672A JPS531036B2 (https=) | 1972-09-11 | 1972-09-11 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4947076A JPS4947076A (https=) | 1974-05-07 |
| JPS531036B2 true JPS531036B2 (https=) | 1978-01-13 |
Family
ID=14029168
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9153672A Expired JPS531036B2 (https=) | 1971-10-06 | 1972-09-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS531036B2 (https=) |
-
1972
- 1972-09-11 JP JP9153672A patent/JPS531036B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4947076A (https=) | 1974-05-07 |