JPS531036B2 - - Google Patents

Info

Publication number
JPS531036B2
JPS531036B2 JP9153672A JP9153672A JPS531036B2 JP S531036 B2 JPS531036 B2 JP S531036B2 JP 9153672 A JP9153672 A JP 9153672A JP 9153672 A JP9153672 A JP 9153672A JP S531036 B2 JPS531036 B2 JP S531036B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP9153672A
Other languages
Japanese (ja)
Other versions
JPS4947076A (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9153672A priority Critical patent/JPS531036B2/ja
Priority to NL7213557A priority patent/NL7213557A/xx
Priority to US295554A priority patent/US3896765A/en
Priority to DE2249144A priority patent/DE2249144C3/de
Publication of JPS4947076A publication Critical patent/JPS4947076A/ja
Publication of JPS531036B2 publication Critical patent/JPS531036B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP9153672A 1971-10-06 1972-09-11 Expired JPS531036B2 (enrdf_load_stackoverflow)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP9153672A JPS531036B2 (enrdf_load_stackoverflow) 1972-09-11 1972-09-11
NL7213557A NL7213557A (enrdf_load_stackoverflow) 1971-10-06 1972-10-06
US295554A US3896765A (en) 1971-10-06 1972-10-06 Apparatus for liquid-phase epitaxial growth
DE2249144A DE2249144C3 (de) 1971-10-06 1972-10-06 11.09.72 Japan 47-91536 Vorrichtung zum epitaktischen Aufwachsen einer Halbleiterschicht auf ein Substrat

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9153672A JPS531036B2 (enrdf_load_stackoverflow) 1972-09-11 1972-09-11

Publications (2)

Publication Number Publication Date
JPS4947076A JPS4947076A (enrdf_load_stackoverflow) 1974-05-07
JPS531036B2 true JPS531036B2 (enrdf_load_stackoverflow) 1978-01-13

Family

ID=14029168

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9153672A Expired JPS531036B2 (enrdf_load_stackoverflow) 1971-10-06 1972-09-11

Country Status (1)

Country Link
JP (1) JPS531036B2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS4947076A (enrdf_load_stackoverflow) 1974-05-07

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