JPS53102845A - Partial ionic working treatment method - Google Patents
Partial ionic working treatment methodInfo
- Publication number
- JPS53102845A JPS53102845A JP1773077A JP1773077A JPS53102845A JP S53102845 A JPS53102845 A JP S53102845A JP 1773077 A JP1773077 A JP 1773077A JP 1773077 A JP1773077 A JP 1773077A JP S53102845 A JPS53102845 A JP S53102845A
- Authority
- JP
- Japan
- Prior art keywords
- treatment method
- working treatment
- partial ionic
- ionic working
- partial
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1773077A JPS6031905B2 (en) | 1977-02-22 | 1977-02-22 | Partial ion etching method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1773077A JPS6031905B2 (en) | 1977-02-22 | 1977-02-22 | Partial ion etching method |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS53102845A true JPS53102845A (en) | 1978-09-07 |
JPS6031905B2 JPS6031905B2 (en) | 1985-07-25 |
Family
ID=11951853
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1773077A Expired JPS6031905B2 (en) | 1977-02-22 | 1977-02-22 | Partial ion etching method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6031905B2 (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61139028A (en) * | 1984-12-11 | 1986-06-26 | Fuji Photo Film Co Ltd | Formation of pattern |
JPH02118063A (en) * | 1988-10-27 | 1990-05-02 | Fujikura Ltd | Production of oxide superconductor |
JPH04288815A (en) * | 1990-10-09 | 1992-10-13 | Internatl Business Mach Corp <Ibm> | Fine wire width pattern formation method, exposure device and combination structure |
-
1977
- 1977-02-22 JP JP1773077A patent/JPS6031905B2/en not_active Expired
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61139028A (en) * | 1984-12-11 | 1986-06-26 | Fuji Photo Film Co Ltd | Formation of pattern |
JPH02118063A (en) * | 1988-10-27 | 1990-05-02 | Fujikura Ltd | Production of oxide superconductor |
JPH04288815A (en) * | 1990-10-09 | 1992-10-13 | Internatl Business Mach Corp <Ibm> | Fine wire width pattern formation method, exposure device and combination structure |
Also Published As
Publication number | Publication date |
---|---|
JPS6031905B2 (en) | 1985-07-25 |
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