JPS5299835A - Apparatus for supporting optical system independently of smog chanber - Google Patents

Apparatus for supporting optical system independently of smog chanber

Info

Publication number
JPS5299835A
JPS5299835A JP1548876A JP1548876A JPS5299835A JP S5299835 A JPS5299835 A JP S5299835A JP 1548876 A JP1548876 A JP 1548876A JP 1548876 A JP1548876 A JP 1548876A JP S5299835 A JPS5299835 A JP S5299835A
Authority
JP
Japan
Prior art keywords
chanber
smog
optical system
supporting optical
system independently
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1548876A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5524057B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Riichi Fukutome
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc filed Critical Ulvac Inc
Priority to JP1548876A priority Critical patent/JPS5299835A/ja
Publication of JPS5299835A publication Critical patent/JPS5299835A/ja
Publication of JPS5524057B2 publication Critical patent/JPS5524057B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Details Of Measuring And Other Instruments (AREA)
  • Optical Measuring Cells (AREA)
JP1548876A 1976-02-17 1976-02-17 Apparatus for supporting optical system independently of smog chanber Granted JPS5299835A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1548876A JPS5299835A (en) 1976-02-17 1976-02-17 Apparatus for supporting optical system independently of smog chanber

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1548876A JPS5299835A (en) 1976-02-17 1976-02-17 Apparatus for supporting optical system independently of smog chanber

Publications (2)

Publication Number Publication Date
JPS5299835A true JPS5299835A (en) 1977-08-22
JPS5524057B2 JPS5524057B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1980-06-26

Family

ID=11890171

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1548876A Granted JPS5299835A (en) 1976-02-17 1976-02-17 Apparatus for supporting optical system independently of smog chanber

Country Status (1)

Country Link
JP (1) JPS5299835A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS588147U (ja) * 1981-07-09 1983-01-19 株式会社東芝 煙道内ガス分析装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS588147U (ja) * 1981-07-09 1983-01-19 株式会社東芝 煙道内ガス分析装置

Also Published As

Publication number Publication date
JPS5524057B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1980-06-26

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