JPS529509B2 - - Google Patents
Info
- Publication number
- JPS529509B2 JPS529509B2 JP47099049A JP9904972A JPS529509B2 JP S529509 B2 JPS529509 B2 JP S529509B2 JP 47099049 A JP47099049 A JP 47099049A JP 9904972 A JP9904972 A JP 9904972A JP S529509 B2 JPS529509 B2 JP S529509B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP47099049A JPS529509B2 (fr) | 1972-10-04 | 1972-10-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP47099049A JPS529509B2 (fr) | 1972-10-04 | 1972-10-04 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4958772A JPS4958772A (fr) | 1974-06-07 |
| JPS529509B2 true JPS529509B2 (fr) | 1977-03-16 |
Family
ID=14236685
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP47099049A Expired JPS529509B2 (fr) | 1972-10-04 | 1972-10-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS529509B2 (fr) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01298791A (ja) * | 1988-05-27 | 1989-12-01 | Mitsubishi Gas Chem Co Inc | 立体プリント配線体の製造法 |
-
1972
- 1972-10-04 JP JP47099049A patent/JPS529509B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4958772A (fr) | 1974-06-07 |