JPS529509B2 - - Google Patents

Info

Publication number
JPS529509B2
JPS529509B2 JP47099049A JP9904972A JPS529509B2 JP S529509 B2 JPS529509 B2 JP S529509B2 JP 47099049 A JP47099049 A JP 47099049A JP 9904972 A JP9904972 A JP 9904972A JP S529509 B2 JPS529509 B2 JP S529509B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP47099049A
Other languages
Japanese (ja)
Other versions
JPS4958772A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP47099049A priority Critical patent/JPS529509B2/ja
Publication of JPS4958772A publication Critical patent/JPS4958772A/ja
Publication of JPS529509B2 publication Critical patent/JPS529509B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP47099049A 1972-10-04 1972-10-04 Expired JPS529509B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP47099049A JPS529509B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1972-10-04 1972-10-04

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP47099049A JPS529509B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1972-10-04 1972-10-04

Publications (2)

Publication Number Publication Date
JPS4958772A JPS4958772A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1974-06-07
JPS529509B2 true JPS529509B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1977-03-16

Family

ID=14236685

Family Applications (1)

Application Number Title Priority Date Filing Date
JP47099049A Expired JPS529509B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1972-10-04 1972-10-04

Country Status (1)

Country Link
JP (1) JPS529509B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01298791A (ja) * 1988-05-27 1989-12-01 Mitsubishi Gas Chem Co Inc 立体プリント配線体の製造法

Also Published As

Publication number Publication date
JPS4958772A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1974-06-07

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