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Hitachi Ltd
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Hitachi Ltd
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Publication date
Application filed by Hitachi LtdfiledCriticalHitachi Ltd
Priority to JP1040176ApriorityCriticalpatent/JPS5294189A/en
Publication of JPS5294189ApublicationCriticalpatent/JPS5294189A/en
PURPOSE: To improve the reliability of protection equipment for gas suction stopping by detecting the flowing state of gas purifying flow water as temperature change.