JPS5289960A - Apparatus for detecting and measuring microflow rate - Google Patents

Apparatus for detecting and measuring microflow rate

Info

Publication number
JPS5289960A
JPS5289960A JP625976A JP625976A JPS5289960A JP S5289960 A JPS5289960 A JP S5289960A JP 625976 A JP625976 A JP 625976A JP 625976 A JP625976 A JP 625976A JP S5289960 A JPS5289960 A JP S5289960A
Authority
JP
Japan
Prior art keywords
measuring
detecting
microflow rate
microflow
rate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP625976A
Other languages
Japanese (ja)
Inventor
Wahei Inoue
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mayekawa Manufacturing Co
Original Assignee
Mayekawa Manufacturing Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mayekawa Manufacturing Co filed Critical Mayekawa Manufacturing Co
Priority to JP625976A priority Critical patent/JPS5289960A/en
Publication of JPS5289960A publication Critical patent/JPS5289960A/en
Pending legal-status Critical Current

Links

Landscapes

  • Measuring Volume Flow (AREA)
JP625976A 1976-01-22 1976-01-22 Apparatus for detecting and measuring microflow rate Pending JPS5289960A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP625976A JPS5289960A (en) 1976-01-22 1976-01-22 Apparatus for detecting and measuring microflow rate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP625976A JPS5289960A (en) 1976-01-22 1976-01-22 Apparatus for detecting and measuring microflow rate

Publications (1)

Publication Number Publication Date
JPS5289960A true JPS5289960A (en) 1977-07-28

Family

ID=11633465

Family Applications (1)

Application Number Title Priority Date Filing Date
JP625976A Pending JPS5289960A (en) 1976-01-22 1976-01-22 Apparatus for detecting and measuring microflow rate

Country Status (1)

Country Link
JP (1) JPS5289960A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63150630A (en) * 1986-12-15 1988-06-23 Ebara Infilco Co Ltd Flow detector for fluid

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3304766A (en) * 1964-01-17 1967-02-21 Texaco Inc Method for measuring two-phase fluid flow

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3304766A (en) * 1964-01-17 1967-02-21 Texaco Inc Method for measuring two-phase fluid flow

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63150630A (en) * 1986-12-15 1988-06-23 Ebara Infilco Co Ltd Flow detector for fluid

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