JPS5288968U - - Google Patents

Info

Publication number
JPS5288968U
JPS5288968U JP17714875U JP17714875U JPS5288968U JP S5288968 U JPS5288968 U JP S5288968U JP 17714875 U JP17714875 U JP 17714875U JP 17714875 U JP17714875 U JP 17714875U JP S5288968 U JPS5288968 U JP S5288968U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17714875U
Other languages
Japanese (ja)
Other versions
JPS5721321Y2 (https=
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1975177148U priority Critical patent/JPS5721321Y2/ja
Publication of JPS5288968U publication Critical patent/JPS5288968U/ja
Application granted granted Critical
Publication of JPS5721321Y2 publication Critical patent/JPS5721321Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
  • Weting (AREA)
  • Cleaning By Liquid Or Steam (AREA)
JP1975177148U 1975-12-26 1975-12-26 Expired JPS5721321Y2 (https=)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1975177148U JPS5721321Y2 (https=) 1975-12-26 1975-12-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1975177148U JPS5721321Y2 (https=) 1975-12-26 1975-12-26

Publications (2)

Publication Number Publication Date
JPS5288968U true JPS5288968U (https=) 1977-07-02
JPS5721321Y2 JPS5721321Y2 (https=) 1982-05-08

Family

ID=28655459

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1975177148U Expired JPS5721321Y2 (https=) 1975-12-26 1975-12-26

Country Status (1)

Country Link
JP (1) JPS5721321Y2 (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS551866A (en) * 1978-06-20 1980-01-09 Fuji Plant Kogyo Kk Method and apparatus for forming uniform film on thin base plate

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5018759A (https=) * 1973-06-26 1975-02-27
JPS5093775A (https=) * 1973-12-19 1975-07-26

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5018759A (https=) * 1973-06-26 1975-02-27
JPS5093775A (https=) * 1973-12-19 1975-07-26

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS551866A (en) * 1978-06-20 1980-01-09 Fuji Plant Kogyo Kk Method and apparatus for forming uniform film on thin base plate

Also Published As

Publication number Publication date
JPS5721321Y2 (https=) 1982-05-08

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