JPS5288968U - - Google Patents

Info

Publication number
JPS5288968U
JPS5288968U JP17714875U JP17714875U JPS5288968U JP S5288968 U JPS5288968 U JP S5288968U JP 17714875 U JP17714875 U JP 17714875U JP 17714875 U JP17714875 U JP 17714875U JP S5288968 U JPS5288968 U JP S5288968U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17714875U
Other languages
Japanese (ja)
Other versions
JPS5721321Y2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1975177148U priority Critical patent/JPS5721321Y2/ja
Publication of JPS5288968U publication Critical patent/JPS5288968U/ja
Application granted granted Critical
Publication of JPS5721321Y2 publication Critical patent/JPS5721321Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Cleaning By Liquid Or Steam (AREA)
  • Coating Apparatus (AREA)
  • Weting (AREA)
JP1975177148U 1975-12-26 1975-12-26 Expired JPS5721321Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1975177148U JPS5721321Y2 (en) 1975-12-26 1975-12-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1975177148U JPS5721321Y2 (en) 1975-12-26 1975-12-26

Publications (2)

Publication Number Publication Date
JPS5288968U true JPS5288968U (en) 1977-07-02
JPS5721321Y2 JPS5721321Y2 (en) 1982-05-08

Family

ID=28655459

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1975177148U Expired JPS5721321Y2 (en) 1975-12-26 1975-12-26

Country Status (1)

Country Link
JP (1) JPS5721321Y2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS551866A (en) * 1978-06-20 1980-01-09 Fuji Plant Kogyo Kk Method and apparatus for forming uniform film on thin base plate

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5018759A (en) * 1973-06-26 1975-02-27
JPS5093775A (en) * 1973-12-19 1975-07-26

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5018759A (en) * 1973-06-26 1975-02-27
JPS5093775A (en) * 1973-12-19 1975-07-26

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS551866A (en) * 1978-06-20 1980-01-09 Fuji Plant Kogyo Kk Method and apparatus for forming uniform film on thin base plate

Also Published As

Publication number Publication date
JPS5721321Y2 (en) 1982-05-08

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