JPS5288556U - - Google Patents

Info

Publication number
JPS5288556U
JPS5288556U JP17814576U JP17814576U JPS5288556U JP S5288556 U JPS5288556 U JP S5288556U JP 17814576 U JP17814576 U JP 17814576U JP 17814576 U JP17814576 U JP 17814576U JP S5288556 U JPS5288556 U JP S5288556U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17814576U
Other languages
Japanese (ja)
Other versions
JPS5353412Y2 (en:Method
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17814576U priority Critical patent/JPS5353412Y2/ja
Publication of JPS5288556U publication Critical patent/JPS5288556U/ja
Application granted granted Critical
Publication of JPS5353412Y2 publication Critical patent/JPS5353412Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP17814576U 1976-12-29 1976-12-29 Expired JPS5353412Y2 (en:Method)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17814576U JPS5353412Y2 (en:Method) 1976-12-29 1976-12-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17814576U JPS5353412Y2 (en:Method) 1976-12-29 1976-12-29

Publications (2)

Publication Number Publication Date
JPS5288556U true JPS5288556U (en:Method) 1977-07-01
JPS5353412Y2 JPS5353412Y2 (en:Method) 1978-12-20

Family

ID=28656432

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17814576U Expired JPS5353412Y2 (en:Method) 1976-12-29 1976-12-29

Country Status (1)

Country Link
JP (1) JPS5353412Y2 (en:Method)

Also Published As

Publication number Publication date
JPS5353412Y2 (en:Method) 1978-12-20

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