JPS5288556U - - Google Patents

Info

Publication number
JPS5288556U
JPS5288556U JP17814576U JP17814576U JPS5288556U JP S5288556 U JPS5288556 U JP S5288556U JP 17814576 U JP17814576 U JP 17814576U JP 17814576 U JP17814576 U JP 17814576U JP S5288556 U JPS5288556 U JP S5288556U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17814576U
Other languages
Japanese (ja)
Other versions
JPS5353412Y2 (de
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17814576U priority Critical patent/JPS5353412Y2/ja
Publication of JPS5288556U publication Critical patent/JPS5288556U/ja
Application granted granted Critical
Publication of JPS5353412Y2 publication Critical patent/JPS5353412Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP17814576U 1976-12-29 1976-12-29 Expired JPS5353412Y2 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17814576U JPS5353412Y2 (de) 1976-12-29 1976-12-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17814576U JPS5353412Y2 (de) 1976-12-29 1976-12-29

Publications (2)

Publication Number Publication Date
JPS5288556U true JPS5288556U (de) 1977-07-01
JPS5353412Y2 JPS5353412Y2 (de) 1978-12-20

Family

ID=28656432

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17814576U Expired JPS5353412Y2 (de) 1976-12-29 1976-12-29

Country Status (1)

Country Link
JP (1) JPS5353412Y2 (de)

Also Published As

Publication number Publication date
JPS5353412Y2 (de) 1978-12-20

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