JPS5287661A - Method of producing hybrid integrated circuit substrate - Google Patents

Method of producing hybrid integrated circuit substrate

Info

Publication number
JPS5287661A
JPS5287661A JP422776A JP422776A JPS5287661A JP S5287661 A JPS5287661 A JP S5287661A JP 422776 A JP422776 A JP 422776A JP 422776 A JP422776 A JP 422776A JP S5287661 A JPS5287661 A JP S5287661A
Authority
JP
Japan
Prior art keywords
integrated circuit
circuit substrate
hybrid integrated
producing hybrid
producing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP422776A
Other languages
Japanese (ja)
Inventor
Teruaki Fukuda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP422776A priority Critical patent/JPS5287661A/en
Publication of JPS5287661A publication Critical patent/JPS5287661A/en
Pending legal-status Critical Current

Links

Landscapes

  • Laser Beam Processing (AREA)
JP422776A 1976-01-17 1976-01-17 Method of producing hybrid integrated circuit substrate Pending JPS5287661A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP422776A JPS5287661A (en) 1976-01-17 1976-01-17 Method of producing hybrid integrated circuit substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP422776A JPS5287661A (en) 1976-01-17 1976-01-17 Method of producing hybrid integrated circuit substrate

Publications (1)

Publication Number Publication Date
JPS5287661A true JPS5287661A (en) 1977-07-21

Family

ID=11578677

Family Applications (1)

Application Number Title Priority Date Filing Date
JP422776A Pending JPS5287661A (en) 1976-01-17 1976-01-17 Method of producing hybrid integrated circuit substrate

Country Status (1)

Country Link
JP (1) JPS5287661A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6197991A (en) * 1984-10-19 1986-05-16 インタ−ナショナル　ビジネス　マシ−ンズ　コ−ポレ−ション Trench pattern formation for thermovolatile substrate

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6197991A (en) * 1984-10-19 1986-05-16 インタ−ナショナル　ビジネス　マシ−ンズ　コ−ポレ−ション Trench pattern formation for thermovolatile substrate
JPH024153B2 (en) * 1984-10-19 1990-01-26 Intaanashonaru Bijinesu Mashiinzu Corp

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