JPS5287661A - Method of producing hybrid integrated circuit substrate - Google Patents
Method of producing hybrid integrated circuit substrateInfo
- Publication number
- JPS5287661A JPS5287661A JP422776A JP422776A JPS5287661A JP S5287661 A JPS5287661 A JP S5287661A JP 422776 A JP422776 A JP 422776A JP 422776 A JP422776 A JP 422776A JP S5287661 A JPS5287661 A JP S5287661A
- Authority
- JP
- Japan
- Prior art keywords
- integrated circuit
- circuit substrate
- hybrid integrated
- producing hybrid
- producing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Laser Beam Processing (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP422776A JPS5287661A (en) | 1976-01-17 | 1976-01-17 | Method of producing hybrid integrated circuit substrate |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP422776A JPS5287661A (en) | 1976-01-17 | 1976-01-17 | Method of producing hybrid integrated circuit substrate |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5287661A true JPS5287661A (en) | 1977-07-21 |
Family
ID=11578677
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP422776A Pending JPS5287661A (en) | 1976-01-17 | 1976-01-17 | Method of producing hybrid integrated circuit substrate |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5287661A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6197991A (en) * | 1984-10-19 | 1986-05-16 | インタ−ナショナル ビジネス マシ−ンズ コ−ポレ−ション | Trench pattern formation for thermovolatile substrate |
-
1976
- 1976-01-17 JP JP422776A patent/JPS5287661A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6197991A (en) * | 1984-10-19 | 1986-05-16 | インタ−ナショナル ビジネス マシ−ンズ コ−ポレ−ション | Trench pattern formation for thermovolatile substrate |
JPH024153B2 (en) * | 1984-10-19 | 1990-01-26 | Intaanashonaru Bijinesu Mashiinzu Corp |
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