JPS5286369U - - Google Patents
Info
- Publication number
- JPS5286369U JPS5286369U JP17576175U JP17576175U JPS5286369U JP S5286369 U JPS5286369 U JP S5286369U JP 17576175 U JP17576175 U JP 17576175U JP 17576175 U JP17576175 U JP 17576175U JP S5286369 U JPS5286369 U JP S5286369U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17576175U JPS5286369U (enExample) | 1975-12-24 | 1975-12-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17576175U JPS5286369U (enExample) | 1975-12-24 | 1975-12-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5286369U true JPS5286369U (enExample) | 1977-06-28 |
Family
ID=28654099
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17576175U Pending JPS5286369U (enExample) | 1975-12-24 | 1975-12-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5286369U (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58213438A (ja) * | 1982-05-24 | 1983-12-12 | バリアン・アソシエイツ・インコ−ポレイテツド | ウエ−ハ移送装置 |
-
1975
- 1975-12-24 JP JP17576175U patent/JPS5286369U/ja active Pending
Non-Patent Citations (1)
| Title |
|---|
| IBM.TECHNICAL DISCLOSURE BUTTETIN=1972 * |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58213438A (ja) * | 1982-05-24 | 1983-12-12 | バリアン・アソシエイツ・インコ−ポレイテツド | ウエ−ハ移送装置 |