JPS5285462A - Plate feed stand - Google Patents

Plate feed stand

Info

Publication number
JPS5285462A
JPS5285462A JP155876A JP155876A JPS5285462A JP S5285462 A JPS5285462 A JP S5285462A JP 155876 A JP155876 A JP 155876A JP 155876 A JP155876 A JP 155876A JP S5285462 A JPS5285462 A JP S5285462A
Authority
JP
Japan
Prior art keywords
plate feed
feed stand
plate
paltes
rails
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP155876A
Other languages
Japanese (ja)
Inventor
Masaru Tsukahara
Masaru Takaishi
Hitoshi Horimuki
Hisaaki Wakatsuki
Sadao Tanabe
Masato Fujita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP155876A priority Critical patent/JPS5285462A/en
Publication of JPS5285462A publication Critical patent/JPS5285462A/en
Pending legal-status Critical Current

Links

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  • Registering Or Overturning Sheets (AREA)

Abstract

PURPOSE: To increase the number of charge of paltes and facilitate their removal by providing a stopper piece connected to an operating lever to the inclined chute provided with rails for guiding semiconductor-wafer fixing plates so as not to lay down the plate.
COPYRIGHT: (C)1977,JPO&Japio
JP155876A 1976-01-09 1976-01-09 Plate feed stand Pending JPS5285462A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP155876A JPS5285462A (en) 1976-01-09 1976-01-09 Plate feed stand

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP155876A JPS5285462A (en) 1976-01-09 1976-01-09 Plate feed stand

Publications (1)

Publication Number Publication Date
JPS5285462A true JPS5285462A (en) 1977-07-15

Family

ID=11504846

Family Applications (1)

Application Number Title Priority Date Filing Date
JP155876A Pending JPS5285462A (en) 1976-01-09 1976-01-09 Plate feed stand

Country Status (1)

Country Link
JP (1) JPS5285462A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60124042U (en) * 1984-01-27 1985-08-21 関西日本電気株式会社 semiconductor manufacturing equipment

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60124042U (en) * 1984-01-27 1985-08-21 関西日本電気株式会社 semiconductor manufacturing equipment

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