JPS5285371U - - Google Patents

Info

Publication number
JPS5285371U
JPS5285371U JP1975173405U JP17340575U JPS5285371U JP S5285371 U JPS5285371 U JP S5285371U JP 1975173405 U JP1975173405 U JP 1975173405U JP 17340575 U JP17340575 U JP 17340575U JP S5285371 U JPS5285371 U JP S5285371U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1975173405U
Other languages
Japanese (ja)
Other versions
JPS5552673Y2 (cg-RX-API-DMAC10.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1975173405U priority Critical patent/JPS5552673Y2/ja
Publication of JPS5285371U publication Critical patent/JPS5285371U/ja
Application granted granted Critical
Publication of JPS5552673Y2 publication Critical patent/JPS5552673Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP1975173405U 1975-12-20 1975-12-20 Expired JPS5552673Y2 (cg-RX-API-DMAC10.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1975173405U JPS5552673Y2 (cg-RX-API-DMAC10.html) 1975-12-20 1975-12-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1975173405U JPS5552673Y2 (cg-RX-API-DMAC10.html) 1975-12-20 1975-12-20

Publications (2)

Publication Number Publication Date
JPS5285371U true JPS5285371U (cg-RX-API-DMAC10.html) 1977-06-25
JPS5552673Y2 JPS5552673Y2 (cg-RX-API-DMAC10.html) 1980-12-06

Family

ID=28651811

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1975173405U Expired JPS5552673Y2 (cg-RX-API-DMAC10.html) 1975-12-20 1975-12-20

Country Status (1)

Country Link
JP (1) JPS5552673Y2 (cg-RX-API-DMAC10.html)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4834482A (cg-RX-API-DMAC10.html) * 1971-09-04 1973-05-18

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4834482A (cg-RX-API-DMAC10.html) * 1971-09-04 1973-05-18

Also Published As

Publication number Publication date
JPS5552673Y2 (cg-RX-API-DMAC10.html) 1980-12-06

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