JPS528153B2 - - Google Patents
Info
- Publication number
- JPS528153B2 JPS528153B2 JP322473A JP322473A JPS528153B2 JP S528153 B2 JPS528153 B2 JP S528153B2 JP 322473 A JP322473 A JP 322473A JP 322473 A JP322473 A JP 322473A JP S528153 B2 JPS528153 B2 JP S528153B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Local Oxidation Of Silicon (AREA)
- Element Separation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP322473A JPS528153B2 (en:Method) | 1972-12-29 | 1972-12-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP322473A JPS528153B2 (en:Method) | 1972-12-29 | 1972-12-29 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4991586A JPS4991586A (en:Method) | 1974-09-02 |
| JPS528153B2 true JPS528153B2 (en:Method) | 1977-03-07 |
Family
ID=11551461
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP322473A Expired JPS528153B2 (en:Method) | 1972-12-29 | 1972-12-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS528153B2 (en:Method) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5150586A (en) * | 1974-10-30 | 1976-05-04 | Nippon Telegraph & Telephone | Handotaisochino seizohoho |
| JPS61283131A (ja) * | 1985-06-10 | 1986-12-13 | Nippon Telegr & Teleph Corp <Ntt> | 半導体集積回路基板の製造方法 |
-
1972
- 1972-12-29 JP JP322473A patent/JPS528153B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4991586A (en:Method) | 1974-09-02 |