JPS528149B2 - - Google Patents
Info
- Publication number
- JPS528149B2 JPS528149B2 JP47112566A JP11256672A JPS528149B2 JP S528149 B2 JPS528149 B2 JP S528149B2 JP 47112566 A JP47112566 A JP 47112566A JP 11256672 A JP11256672 A JP 11256672A JP S528149 B2 JPS528149 B2 JP S528149B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
- Light Receiving Elements (AREA)
- Physical Vapour Deposition (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP47112566A JPS528149B2 (ja) | 1972-11-11 | 1972-11-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP47112566A JPS528149B2 (ja) | 1972-11-11 | 1972-11-11 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4971869A JPS4971869A (ja) | 1974-07-11 |
| JPS528149B2 true JPS528149B2 (ja) | 1977-03-07 |
Family
ID=14589886
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP47112566A Expired JPS528149B2 (ja) | 1972-11-11 | 1972-11-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS528149B2 (ja) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5181792A (ja) * | 1975-01-17 | 1976-07-17 | Tokyo Shibaura Electric Co | Kibanjohenohakumakukeiseihoho |
-
1972
- 1972-11-11 JP JP47112566A patent/JPS528149B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4971869A (ja) | 1974-07-11 |