JPS5279069U - - Google Patents

Info

Publication number
JPS5279069U
JPS5279069U JP1975166676U JP16667675U JPS5279069U JP S5279069 U JPS5279069 U JP S5279069U JP 1975166676 U JP1975166676 U JP 1975166676U JP 16667675 U JP16667675 U JP 16667675U JP S5279069 U JPS5279069 U JP S5279069U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1975166676U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1975166676U priority Critical patent/JPS5279069U/ja
Publication of JPS5279069U publication Critical patent/JPS5279069U/ja
Pending legal-status Critical Current

Links

JP1975166676U 1975-12-09 1975-12-09 Pending JPS5279069U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1975166676U JPS5279069U (en) 1975-12-09 1975-12-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1975166676U JPS5279069U (en) 1975-12-09 1975-12-09

Publications (1)

Publication Number Publication Date
JPS5279069U true JPS5279069U (en) 1977-06-13

Family

ID=28645335

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1975166676U Pending JPS5279069U (en) 1975-12-09 1975-12-09

Country Status (1)

Country Link
JP (1) JPS5279069U (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5487223A (en) * 1977-12-23 1979-07-11 Dainippon Printing Co Ltd Mask for soft x rays lithography and its preparation
JPS5552442A (en) * 1978-10-12 1980-04-16 Tsuonguraato Mejiei Tanatsui E Universal building frame construction
JPS5957433A (en) * 1982-09-27 1984-04-03 Nippon Telegr & Teleph Corp <Ntt> X-ray mask and its manufacture
JPS62155518A (en) * 1977-12-23 1987-07-10 Dainippon Printing Co Ltd Mask for soft x-ray lithography

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5487223A (en) * 1977-12-23 1979-07-11 Dainippon Printing Co Ltd Mask for soft x rays lithography and its preparation
JPS62155518A (en) * 1977-12-23 1987-07-10 Dainippon Printing Co Ltd Mask for soft x-ray lithography
JPS5552442A (en) * 1978-10-12 1980-04-16 Tsuonguraato Mejiei Tanatsui E Universal building frame construction
JPS5957433A (en) * 1982-09-27 1984-04-03 Nippon Telegr & Teleph Corp <Ntt> X-ray mask and its manufacture

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