JPS5278533U - - Google Patents
Info
- Publication number
- JPS5278533U JPS5278533U JP16668275U JP16668275U JPS5278533U JP S5278533 U JPS5278533 U JP S5278533U JP 16668275 U JP16668275 U JP 16668275U JP 16668275 U JP16668275 U JP 16668275U JP S5278533 U JPS5278533 U JP S5278533U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16668275U JPS5278533U (nl) | 1975-12-09 | 1975-12-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16668275U JPS5278533U (nl) | 1975-12-09 | 1975-12-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5278533U true JPS5278533U (nl) | 1977-06-11 |
Family
ID=28645341
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16668275U Pending JPS5278533U (nl) | 1975-12-09 | 1975-12-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5278533U (nl) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH058936U (ja) * | 1991-07-15 | 1993-02-05 | 関西日本電気株式会社 | 半導体製造装置 |
-
1975
- 1975-12-09 JP JP16668275U patent/JPS5278533U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH058936U (ja) * | 1991-07-15 | 1993-02-05 | 関西日本電気株式会社 | 半導体製造装置 |