JPS5276271U - - Google Patents
Info
- Publication number
- JPS5276271U JPS5276271U JP16509975U JP16509975U JPS5276271U JP S5276271 U JPS5276271 U JP S5276271U JP 16509975 U JP16509975 U JP 16509975U JP 16509975 U JP16509975 U JP 16509975U JP S5276271 U JPS5276271 U JP S5276271U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- ing And Chemical Polishing (AREA)
- Drying Of Semiconductors (AREA)
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16509975U JPS5276271U (enExample) | 1975-12-04 | 1975-12-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16509975U JPS5276271U (enExample) | 1975-12-04 | 1975-12-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5276271U true JPS5276271U (enExample) | 1977-06-07 |
Family
ID=28643856
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16509975U Pending JPS5276271U (enExample) | 1975-12-04 | 1975-12-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5276271U (enExample) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3879597A (en) * | 1974-08-16 | 1975-04-22 | Int Plasma Corp | Plasma etching device and process |
-
1975
- 1975-12-04 JP JP16509975U patent/JPS5276271U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3879597A (en) * | 1974-08-16 | 1975-04-22 | Int Plasma Corp | Plasma etching device and process |