JPS5276271U - - Google Patents

Info

Publication number
JPS5276271U
JPS5276271U JP16509975U JP16509975U JPS5276271U JP S5276271 U JPS5276271 U JP S5276271U JP 16509975 U JP16509975 U JP 16509975U JP 16509975 U JP16509975 U JP 16509975U JP S5276271 U JPS5276271 U JP S5276271U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16509975U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16509975U priority Critical patent/JPS5276271U/ja
Publication of JPS5276271U publication Critical patent/JPS5276271U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
  • Weting (AREA)
  • ing And Chemical Polishing (AREA)
JP16509975U 1975-12-04 1975-12-04 Pending JPS5276271U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16509975U JPS5276271U (enrdf_load_stackoverflow) 1975-12-04 1975-12-04

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16509975U JPS5276271U (enrdf_load_stackoverflow) 1975-12-04 1975-12-04

Publications (1)

Publication Number Publication Date
JPS5276271U true JPS5276271U (enrdf_load_stackoverflow) 1977-06-07

Family

ID=28643856

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16509975U Pending JPS5276271U (enrdf_load_stackoverflow) 1975-12-04 1975-12-04

Country Status (1)

Country Link
JP (1) JPS5276271U (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3879597A (en) * 1974-08-16 1975-04-22 Int Plasma Corp Plasma etching device and process

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3879597A (en) * 1974-08-16 1975-04-22 Int Plasma Corp Plasma etching device and process

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