JPS5276240A - Method of forming shaping holes for obtaining electron beam having predetermined cross section - Google Patents

Method of forming shaping holes for obtaining electron beam having predetermined cross section

Info

Publication number
JPS5276240A
JPS5276240A JP50151998A JP15199875A JPS5276240A JP S5276240 A JPS5276240 A JP S5276240A JP 50151998 A JP50151998 A JP 50151998A JP 15199875 A JP15199875 A JP 15199875A JP S5276240 A JPS5276240 A JP S5276240A
Authority
JP
Japan
Prior art keywords
section
electron beam
predetermined cross
shaping holes
forming shaping
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP50151998A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5614150B2 (cs
Inventor
Hideo Kuniyoshi
Hideaki Takehara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Victor Company of Japan Ltd
Original Assignee
Victor Company of Japan Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Victor Company of Japan Ltd filed Critical Victor Company of Japan Ltd
Priority to JP50151998A priority Critical patent/JPS5276240A/ja
Publication of JPS5276240A publication Critical patent/JPS5276240A/ja
Publication of JPS5614150B2 publication Critical patent/JPS5614150B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
JP50151998A 1975-12-22 1975-12-22 Method of forming shaping holes for obtaining electron beam having predetermined cross section Granted JPS5276240A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50151998A JPS5276240A (en) 1975-12-22 1975-12-22 Method of forming shaping holes for obtaining electron beam having predetermined cross section

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50151998A JPS5276240A (en) 1975-12-22 1975-12-22 Method of forming shaping holes for obtaining electron beam having predetermined cross section

Publications (2)

Publication Number Publication Date
JPS5276240A true JPS5276240A (en) 1977-06-27
JPS5614150B2 JPS5614150B2 (cs) 1981-04-02

Family

ID=15530820

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50151998A Granted JPS5276240A (en) 1975-12-22 1975-12-22 Method of forming shaping holes for obtaining electron beam having predetermined cross section

Country Status (1)

Country Link
JP (1) JPS5276240A (cs)

Also Published As

Publication number Publication date
JPS5614150B2 (cs) 1981-04-02

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