JPS527368B2 - - Google Patents
Info
- Publication number
- JPS527368B2 JPS527368B2 JP46071754A JP7175471A JPS527368B2 JP S527368 B2 JPS527368 B2 JP S527368B2 JP 46071754 A JP46071754 A JP 46071754A JP 7175471 A JP7175471 A JP 7175471A JP S527368 B2 JPS527368 B2 JP S527368B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP46071754A JPS527368B2 (https=) | 1971-09-17 | 1971-09-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP46071754A JPS527368B2 (https=) | 1971-09-17 | 1971-09-17 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4837205A JPS4837205A (https=) | 1973-06-01 |
| JPS527368B2 true JPS527368B2 (https=) | 1977-03-02 |
Family
ID=13469623
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP46071754A Expired JPS527368B2 (https=) | 1971-09-17 | 1971-09-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS527368B2 (https=) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52132602U (https=) * | 1976-04-01 | 1977-10-08 | ||
| JPS565096Y2 (https=) * | 1976-11-30 | 1981-02-04 | ||
| JPS547243A (en) * | 1977-06-20 | 1979-01-19 | Nippon Telegr & Teleph Corp <Ntt> | Pattern input device |
| JPS58138929U (ja) * | 1982-03-11 | 1983-09-19 | 上野化学工業株式会社 | 真空焼付機 |
-
1971
- 1971-09-17 JP JP46071754A patent/JPS527368B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4837205A (https=) | 1973-06-01 |