JPS5272546U - - Google Patents

Info

Publication number
JPS5272546U
JPS5272546U JP15926175U JP15926175U JPS5272546U JP S5272546 U JPS5272546 U JP S5272546U JP 15926175 U JP15926175 U JP 15926175U JP 15926175 U JP15926175 U JP 15926175U JP S5272546 U JPS5272546 U JP S5272546U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15926175U
Other languages
Japanese (ja)
Other versions
JPS5429325Y2 (cg-RX-API-DMAC7.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15926175U priority Critical patent/JPS5429325Y2/ja
Publication of JPS5272546U publication Critical patent/JPS5272546U/ja
Application granted granted Critical
Publication of JPS5429325Y2 publication Critical patent/JPS5429325Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP15926175U 1975-11-26 1975-11-26 Expired JPS5429325Y2 (cg-RX-API-DMAC7.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15926175U JPS5429325Y2 (cg-RX-API-DMAC7.html) 1975-11-26 1975-11-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15926175U JPS5429325Y2 (cg-RX-API-DMAC7.html) 1975-11-26 1975-11-26

Publications (2)

Publication Number Publication Date
JPS5272546U true JPS5272546U (cg-RX-API-DMAC7.html) 1977-05-31
JPS5429325Y2 JPS5429325Y2 (cg-RX-API-DMAC7.html) 1979-09-18

Family

ID=28638287

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15926175U Expired JPS5429325Y2 (cg-RX-API-DMAC7.html) 1975-11-26 1975-11-26

Country Status (1)

Country Link
JP (1) JPS5429325Y2 (cg-RX-API-DMAC7.html)

Also Published As

Publication number Publication date
JPS5429325Y2 (cg-RX-API-DMAC7.html) 1979-09-18

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