JPS5272095A - Ion transmitting method - Google Patents

Ion transmitting method

Info

Publication number
JPS5272095A
JPS5272095A JP14643975A JP14643975A JPS5272095A JP S5272095 A JPS5272095 A JP S5272095A JP 14643975 A JP14643975 A JP 14643975A JP 14643975 A JP14643975 A JP 14643975A JP S5272095 A JPS5272095 A JP S5272095A
Authority
JP
Japan
Prior art keywords
ion
transmitting method
ion transmitting
energy
deceration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14643975A
Other languages
Japanese (ja)
Inventor
Shozo Tamura
Kunihiro Yagi
Kiyoshi Miyake
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP14643975A priority Critical patent/JPS5272095A/en
Publication of JPS5272095A publication Critical patent/JPS5272095A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: A low energy ion transmitting device capable of controlling the ion energy and applying a pure ion only to a target after once drawing out by acceleration and again deceration.
COPYRIGHT: (C)1977,JPO&Japio
JP14643975A 1975-12-10 1975-12-10 Ion transmitting method Pending JPS5272095A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14643975A JPS5272095A (en) 1975-12-10 1975-12-10 Ion transmitting method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14643975A JPS5272095A (en) 1975-12-10 1975-12-10 Ion transmitting method

Publications (1)

Publication Number Publication Date
JPS5272095A true JPS5272095A (en) 1977-06-16

Family

ID=15407679

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14643975A Pending JPS5272095A (en) 1975-12-10 1975-12-10 Ion transmitting method

Country Status (1)

Country Link
JP (1) JPS5272095A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0390100U (en) * 1989-12-28 1991-09-13

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0390100U (en) * 1989-12-28 1991-09-13

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