JPS5271715A - Sputtering ion vacuum pump - Google Patents

Sputtering ion vacuum pump

Info

Publication number
JPS5271715A
JPS5271715A JP1858876A JP1858876A JPS5271715A JP S5271715 A JPS5271715 A JP S5271715A JP 1858876 A JP1858876 A JP 1858876A JP 1858876 A JP1858876 A JP 1858876A JP S5271715 A JPS5271715 A JP S5271715A
Authority
JP
Japan
Prior art keywords
vacuum pump
sputtering ion
ion vacuum
pump
sputtering
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1858876A
Other languages
Japanese (ja)
Inventor
Naotake Saito
Yoshiro Onuma
Kozo Kamiryo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP1858876A priority Critical patent/JPS5271715A/en
Publication of JPS5271715A publication Critical patent/JPS5271715A/en
Pending legal-status Critical Current

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Abstract

PURPOSE: A sputtering ion vacuum pump which is possible to bake out the inner part of the pump with high efficiency and in a short time and of which heater life is long and which can be economically manufactured without damaging the structure of the lamp itself.
COPYRIGHT: (C)1977,JPO&Japio
JP1858876A 1976-02-23 1976-02-23 Sputtering ion vacuum pump Pending JPS5271715A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1858876A JPS5271715A (en) 1976-02-23 1976-02-23 Sputtering ion vacuum pump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1858876A JPS5271715A (en) 1976-02-23 1976-02-23 Sputtering ion vacuum pump

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP4253371A Division JPS5317766B1 (en) 1971-06-16 1971-06-16

Publications (1)

Publication Number Publication Date
JPS5271715A true JPS5271715A (en) 1977-06-15

Family

ID=11975780

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1858876A Pending JPS5271715A (en) 1976-02-23 1976-02-23 Sputtering ion vacuum pump

Country Status (1)

Country Link
JP (1) JPS5271715A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006134798A (en) * 2004-11-09 2006-05-25 Ulvac Japan Ltd Sputter ion pump

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006134798A (en) * 2004-11-09 2006-05-25 Ulvac Japan Ltd Sputter ion pump
JP4557681B2 (en) * 2004-11-09 2010-10-06 株式会社アルバック Sputter ion pump

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