JPS5271715A - Sputtering ion vacuum pump - Google Patents
Sputtering ion vacuum pumpInfo
- Publication number
- JPS5271715A JPS5271715A JP1858876A JP1858876A JPS5271715A JP S5271715 A JPS5271715 A JP S5271715A JP 1858876 A JP1858876 A JP 1858876A JP 1858876 A JP1858876 A JP 1858876A JP S5271715 A JPS5271715 A JP S5271715A
- Authority
- JP
- Japan
- Prior art keywords
- vacuum pump
- sputtering ion
- ion vacuum
- pump
- sputtering
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electron Tubes For Measurement (AREA)
Abstract
PURPOSE: A sputtering ion vacuum pump which is possible to bake out the inner part of the pump with high efficiency and in a short time and of which heater life is long and which can be economically manufactured without damaging the structure of the lamp itself.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1858876A JPS5271715A (en) | 1976-02-23 | 1976-02-23 | Sputtering ion vacuum pump |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1858876A JPS5271715A (en) | 1976-02-23 | 1976-02-23 | Sputtering ion vacuum pump |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4253371A Division JPS5317766B1 (en) | 1971-06-16 | 1971-06-16 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5271715A true JPS5271715A (en) | 1977-06-15 |
Family
ID=11975780
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1858876A Pending JPS5271715A (en) | 1976-02-23 | 1976-02-23 | Sputtering ion vacuum pump |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5271715A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006134798A (en) * | 2004-11-09 | 2006-05-25 | Ulvac Japan Ltd | Sputter ion pump |
-
1976
- 1976-02-23 JP JP1858876A patent/JPS5271715A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006134798A (en) * | 2004-11-09 | 2006-05-25 | Ulvac Japan Ltd | Sputter ion pump |
JP4557681B2 (en) * | 2004-11-09 | 2010-10-06 | 株式会社アルバック | Sputter ion pump |
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