JPS5270892A - Metal oxide semiconductor device with characteristics of rapid change in electric resistance against concentration for the device of reducible gases and preparation process - Google Patents

Metal oxide semiconductor device with characteristics of rapid change in electric resistance against concentration for the device of reducible gases and preparation process

Info

Publication number
JPS5270892A
JPS5270892A JP14629975A JP14629975A JPS5270892A JP S5270892 A JPS5270892 A JP S5270892A JP 14629975 A JP14629975 A JP 14629975A JP 14629975 A JP14629975 A JP 14629975A JP S5270892 A JPS5270892 A JP S5270892A
Authority
JP
Japan
Prior art keywords
metal oxide
oxide semiconductor
preparation process
electric resistance
resistance against
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14629975A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5534381B2 (fr
Inventor
Mitsutoshi Hirata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to JP14629975A priority Critical patent/JPS5270892A/ja
Publication of JPS5270892A publication Critical patent/JPS5270892A/ja
Publication of JPS5534381B2 publication Critical patent/JPS5534381B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
JP14629975A 1975-12-10 1975-12-10 Metal oxide semiconductor device with characteristics of rapid change in electric resistance against concentration for the device of reducible gases and preparation process Granted JPS5270892A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14629975A JPS5270892A (en) 1975-12-10 1975-12-10 Metal oxide semiconductor device with characteristics of rapid change in electric resistance against concentration for the device of reducible gases and preparation process

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14629975A JPS5270892A (en) 1975-12-10 1975-12-10 Metal oxide semiconductor device with characteristics of rapid change in electric resistance against concentration for the device of reducible gases and preparation process

Publications (2)

Publication Number Publication Date
JPS5270892A true JPS5270892A (en) 1977-06-13
JPS5534381B2 JPS5534381B2 (fr) 1980-09-06

Family

ID=15404527

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14629975A Granted JPS5270892A (en) 1975-12-10 1975-12-10 Metal oxide semiconductor device with characteristics of rapid change in electric resistance against concentration for the device of reducible gases and preparation process

Country Status (1)

Country Link
JP (1) JPS5270892A (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6183950A (ja) * 1984-10-01 1986-04-28 Toyamaken 感ガス素子

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59189175U (ja) * 1983-06-02 1984-12-15 北陽電機株式会社 光電スイツチ

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6183950A (ja) * 1984-10-01 1986-04-28 Toyamaken 感ガス素子

Also Published As

Publication number Publication date
JPS5534381B2 (fr) 1980-09-06

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