JPS5270892A - Metal oxide semiconductor device with characteristics of rapid change in electric resistance against concentration for the device of reducible gases and preparation process - Google Patents
Metal oxide semiconductor device with characteristics of rapid change in electric resistance against concentration for the device of reducible gases and preparation processInfo
- Publication number
- JPS5270892A JPS5270892A JP14629975A JP14629975A JPS5270892A JP S5270892 A JPS5270892 A JP S5270892A JP 14629975 A JP14629975 A JP 14629975A JP 14629975 A JP14629975 A JP 14629975A JP S5270892 A JPS5270892 A JP S5270892A
- Authority
- JP
- Japan
- Prior art keywords
- metal oxide
- oxide semiconductor
- preparation process
- electric resistance
- resistance against
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14629975A JPS5270892A (en) | 1975-12-10 | 1975-12-10 | Metal oxide semiconductor device with characteristics of rapid change in electric resistance against concentration for the device of reducible gases and preparation process |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14629975A JPS5270892A (en) | 1975-12-10 | 1975-12-10 | Metal oxide semiconductor device with characteristics of rapid change in electric resistance against concentration for the device of reducible gases and preparation process |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5270892A true JPS5270892A (en) | 1977-06-13 |
JPS5534381B2 JPS5534381B2 (fr) | 1980-09-06 |
Family
ID=15404527
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14629975A Granted JPS5270892A (en) | 1975-12-10 | 1975-12-10 | Metal oxide semiconductor device with characteristics of rapid change in electric resistance against concentration for the device of reducible gases and preparation process |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5270892A (fr) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6183950A (ja) * | 1984-10-01 | 1986-04-28 | Toyamaken | 感ガス素子 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59189175U (ja) * | 1983-06-02 | 1984-12-15 | 北陽電機株式会社 | 光電スイツチ |
-
1975
- 1975-12-10 JP JP14629975A patent/JPS5270892A/ja active Granted
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6183950A (ja) * | 1984-10-01 | 1986-04-28 | Toyamaken | 感ガス素子 |
Also Published As
Publication number | Publication date |
---|---|
JPS5534381B2 (fr) | 1980-09-06 |
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