JPS527047A - Furnace temperature controlling method - Google Patents
Furnace temperature controlling methodInfo
- Publication number
- JPS527047A JPS527047A JP8327475A JP8327475A JPS527047A JP S527047 A JPS527047 A JP S527047A JP 8327475 A JP8327475 A JP 8327475A JP 8327475 A JP8327475 A JP 8327475A JP S527047 A JPS527047 A JP S527047A
- Authority
- JP
- Japan
- Prior art keywords
- controlling method
- temperature controlling
- furnace temperature
- furnace
- temperature
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Control Of Resistance Heating (AREA)
Abstract
PURPOSE: To provide a furnace temperature controlling method which controls effectively from the outside of the furnace the temperature within a semiconductor dispersion furnace to satisfy the strict thermal requirements for attaining a desired temperature.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8327475A JPS527047A (en) | 1975-07-07 | 1975-07-07 | Furnace temperature controlling method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8327475A JPS527047A (en) | 1975-07-07 | 1975-07-07 | Furnace temperature controlling method |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS527047A true JPS527047A (en) | 1977-01-19 |
Family
ID=13797763
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8327475A Pending JPS527047A (en) | 1975-07-07 | 1975-07-07 | Furnace temperature controlling method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS527047A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63121298U (en) * | 1987-01-29 | 1988-08-05 | ||
JPS641293U (en) * | 1987-06-22 | 1989-01-06 | ||
JPH01170899U (en) * | 1988-05-19 | 1989-12-04 |
-
1975
- 1975-07-07 JP JP8327475A patent/JPS527047A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63121298U (en) * | 1987-01-29 | 1988-08-05 | ||
JPS641293U (en) * | 1987-06-22 | 1989-01-06 | ||
JPH01170899U (en) * | 1988-05-19 | 1989-12-04 |
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