JPS527047A - Furnace temperature controlling method - Google Patents

Furnace temperature controlling method

Info

Publication number
JPS527047A
JPS527047A JP8327475A JP8327475A JPS527047A JP S527047 A JPS527047 A JP S527047A JP 8327475 A JP8327475 A JP 8327475A JP 8327475 A JP8327475 A JP 8327475A JP S527047 A JPS527047 A JP S527047A
Authority
JP
Japan
Prior art keywords
controlling method
temperature controlling
furnace temperature
furnace
temperature
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8327475A
Other languages
Japanese (ja)
Inventor
Yoichi Mizushina
Kohei Tomita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kokusai Electric Corp
Original Assignee
Kokusai Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kokusai Electric Corp filed Critical Kokusai Electric Corp
Priority to JP8327475A priority Critical patent/JPS527047A/en
Publication of JPS527047A publication Critical patent/JPS527047A/en
Pending legal-status Critical Current

Links

Landscapes

  • Control Of Resistance Heating (AREA)

Abstract

PURPOSE: To provide a furnace temperature controlling method which controls effectively from the outside of the furnace the temperature within a semiconductor dispersion furnace to satisfy the strict thermal requirements for attaining a desired temperature.
COPYRIGHT: (C)1977,JPO&Japio
JP8327475A 1975-07-07 1975-07-07 Furnace temperature controlling method Pending JPS527047A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8327475A JPS527047A (en) 1975-07-07 1975-07-07 Furnace temperature controlling method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8327475A JPS527047A (en) 1975-07-07 1975-07-07 Furnace temperature controlling method

Publications (1)

Publication Number Publication Date
JPS527047A true JPS527047A (en) 1977-01-19

Family

ID=13797763

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8327475A Pending JPS527047A (en) 1975-07-07 1975-07-07 Furnace temperature controlling method

Country Status (1)

Country Link
JP (1) JPS527047A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63121298U (en) * 1987-01-29 1988-08-05
JPS641293U (en) * 1987-06-22 1989-01-06
JPH01170899U (en) * 1988-05-19 1989-12-04

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63121298U (en) * 1987-01-29 1988-08-05
JPS641293U (en) * 1987-06-22 1989-01-06
JPH01170899U (en) * 1988-05-19 1989-12-04

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