JPS5270149U - - Google Patents

Info

Publication number
JPS5270149U
JPS5270149U JP15743975U JP15743975U JPS5270149U JP S5270149 U JPS5270149 U JP S5270149U JP 15743975 U JP15743975 U JP 15743975U JP 15743975 U JP15743975 U JP 15743975U JP S5270149 U JPS5270149 U JP S5270149U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15743975U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15743975U priority Critical patent/JPS5270149U/ja
Publication of JPS5270149U publication Critical patent/JPS5270149U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP15743975U 1975-11-21 1975-11-21 Pending JPS5270149U (en:Method)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15743975U JPS5270149U (en:Method) 1975-11-21 1975-11-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15743975U JPS5270149U (en:Method) 1975-11-21 1975-11-21

Publications (1)

Publication Number Publication Date
JPS5270149U true JPS5270149U (en:Method) 1977-05-25

Family

ID=28636566

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15743975U Pending JPS5270149U (en:Method) 1975-11-21 1975-11-21

Country Status (1)

Country Link
JP (1) JPS5270149U (en:Method)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63170458U (en:Method) * 1987-04-23 1988-11-07

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5224990A (en) * 1975-08-22 1977-02-24 Shinko Seiki Kk Ionized vapor forming appratus

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5224990A (en) * 1975-08-22 1977-02-24 Shinko Seiki Kk Ionized vapor forming appratus

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63170458U (en:Method) * 1987-04-23 1988-11-07

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