JPS5270148U - - Google Patents

Info

Publication number
JPS5270148U
JPS5270148U JP15710775U JP15710775U JPS5270148U JP S5270148 U JPS5270148 U JP S5270148U JP 15710775 U JP15710775 U JP 15710775U JP 15710775 U JP15710775 U JP 15710775U JP S5270148 U JPS5270148 U JP S5270148U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15710775U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15710775U priority Critical patent/JPS5270148U/ja
Publication of JPS5270148U publication Critical patent/JPS5270148U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP15710775U 1975-11-19 1975-11-19 Pending JPS5270148U (fi)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15710775U JPS5270148U (fi) 1975-11-19 1975-11-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15710775U JPS5270148U (fi) 1975-11-19 1975-11-19

Publications (1)

Publication Number Publication Date
JPS5270148U true JPS5270148U (fi) 1977-05-25

Family

ID=28636253

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15710775U Pending JPS5270148U (fi) 1975-11-19 1975-11-19

Country Status (1)

Country Link
JP (1) JPS5270148U (fi)

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