JPS5268828A - Production method of thin metallic film - Google Patents

Production method of thin metallic film

Info

Publication number
JPS5268828A
JPS5268828A JP14546875A JP14546875A JPS5268828A JP S5268828 A JPS5268828 A JP S5268828A JP 14546875 A JP14546875 A JP 14546875A JP 14546875 A JP14546875 A JP 14546875A JP S5268828 A JPS5268828 A JP S5268828A
Authority
JP
Japan
Prior art keywords
production method
metallic film
thin metallic
thin
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14546875A
Other languages
English (en)
Inventor
Mutsuo Yamanaka
Yasushi Suda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP14546875A priority Critical patent/JPS5268828A/ja
Publication of JPS5268828A publication Critical patent/JPS5268828A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Apparatuses And Processes For Manufacturing Resistors (AREA)
  • Physical Vapour Deposition (AREA)
JP14546875A 1975-12-05 1975-12-05 Production method of thin metallic film Pending JPS5268828A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14546875A JPS5268828A (en) 1975-12-05 1975-12-05 Production method of thin metallic film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14546875A JPS5268828A (en) 1975-12-05 1975-12-05 Production method of thin metallic film

Publications (1)

Publication Number Publication Date
JPS5268828A true JPS5268828A (en) 1977-06-08

Family

ID=15385925

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14546875A Pending JPS5268828A (en) 1975-12-05 1975-12-05 Production method of thin metallic film

Country Status (1)

Country Link
JP (1) JPS5268828A (ja)

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