JPS526855B2 - - Google Patents
Info
- Publication number
- JPS526855B2 JPS526855B2 JP11798872A JP11798872A JPS526855B2 JP S526855 B2 JPS526855 B2 JP S526855B2 JP 11798872 A JP11798872 A JP 11798872A JP 11798872 A JP11798872 A JP 11798872A JP S526855 B2 JPS526855 B2 JP S526855B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11798872A JPS526855B2 (cs) | 1972-11-27 | 1972-11-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11798872A JPS526855B2 (cs) | 1972-11-27 | 1972-11-27 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4976737A JPS4976737A (cs) | 1974-07-24 |
| JPS526855B2 true JPS526855B2 (cs) | 1977-02-25 |
Family
ID=14725228
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11798872A Expired JPS526855B2 (cs) | 1972-11-27 | 1972-11-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS526855B2 (cs) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57150391U (cs) * | 1981-03-11 | 1982-09-21 |
-
1972
- 1972-11-27 JP JP11798872A patent/JPS526855B2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57150391U (cs) * | 1981-03-11 | 1982-09-21 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4976737A (cs) | 1974-07-24 |