JPS5267263U - - Google Patents
Info
- Publication number
- JPS5267263U JPS5267263U JP15497675U JP15497675U JPS5267263U JP S5267263 U JPS5267263 U JP S5267263U JP 15497675 U JP15497675 U JP 15497675U JP 15497675 U JP15497675 U JP 15497675U JP S5267263 U JPS5267263 U JP S5267263U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1975154976U JPS5818213Y2 (ja) | 1975-11-13 | 1975-11-13 | デンシジユウ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1975154976U JPS5818213Y2 (ja) | 1975-11-13 | 1975-11-13 | デンシジユウ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5267263U true JPS5267263U (es) | 1977-05-18 |
| JPS5818213Y2 JPS5818213Y2 (ja) | 1983-04-13 |
Family
ID=28634198
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1975154976U Expired JPS5818213Y2 (ja) | 1975-11-13 | 1975-11-13 | デンシジユウ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5818213Y2 (es) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3876883A (en) * | 1972-06-30 | 1975-04-08 | Ibm | Method and system for focusing and registration in electron beam projection microfabrication |
-
1975
- 1975-11-13 JP JP1975154976U patent/JPS5818213Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3876883A (en) * | 1972-06-30 | 1975-04-08 | Ibm | Method and system for focusing and registration in electron beam projection microfabrication |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5818213Y2 (ja) | 1983-04-13 |