JPS5267263U - - Google Patents

Info

Publication number
JPS5267263U
JPS5267263U JP15497675U JP15497675U JPS5267263U JP S5267263 U JPS5267263 U JP S5267263U JP 15497675 U JP15497675 U JP 15497675U JP 15497675 U JP15497675 U JP 15497675U JP S5267263 U JPS5267263 U JP S5267263U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15497675U
Other languages
Japanese (ja)
Other versions
JPS5818213Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1975154976U priority Critical patent/JPS5818213Y2/ja
Publication of JPS5267263U publication Critical patent/JPS5267263U/ja
Application granted granted Critical
Publication of JPS5818213Y2 publication Critical patent/JPS5818213Y2/ja
Expired legal-status Critical Current

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Landscapes

  • Electron Sources, Ion Sources (AREA)
JP1975154976U 1975-11-13 1975-11-13 デンシジユウ Expired JPS5818213Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1975154976U JPS5818213Y2 (ja) 1975-11-13 1975-11-13 デンシジユウ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1975154976U JPS5818213Y2 (ja) 1975-11-13 1975-11-13 デンシジユウ

Publications (2)

Publication Number Publication Date
JPS5267263U true JPS5267263U (enrdf_load_html_response) 1977-05-18
JPS5818213Y2 JPS5818213Y2 (ja) 1983-04-13

Family

ID=28634198

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1975154976U Expired JPS5818213Y2 (ja) 1975-11-13 1975-11-13 デンシジユウ

Country Status (1)

Country Link
JP (1) JPS5818213Y2 (enrdf_load_html_response)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3876883A (en) * 1972-06-30 1975-04-08 Ibm Method and system for focusing and registration in electron beam projection microfabrication

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3876883A (en) * 1972-06-30 1975-04-08 Ibm Method and system for focusing and registration in electron beam projection microfabrication

Also Published As

Publication number Publication date
JPS5818213Y2 (ja) 1983-04-13

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