JPS5266755U - - Google Patents

Info

Publication number
JPS5266755U
JPS5266755U JP15347575U JP15347575U JPS5266755U JP S5266755 U JPS5266755 U JP S5266755U JP 15347575 U JP15347575 U JP 15347575U JP 15347575 U JP15347575 U JP 15347575U JP S5266755 U JPS5266755 U JP S5266755U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15347575U
Other languages
Japanese (ja)
Other versions
JPS5426356Y2 (nl
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15347575U priority Critical patent/JPS5426356Y2/ja
Publication of JPS5266755U publication Critical patent/JPS5266755U/ja
Application granted granted Critical
Publication of JPS5426356Y2 publication Critical patent/JPS5426356Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP15347575U 1975-11-13 1975-11-13 Expired JPS5426356Y2 (nl)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15347575U JPS5426356Y2 (nl) 1975-11-13 1975-11-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15347575U JPS5426356Y2 (nl) 1975-11-13 1975-11-13

Publications (2)

Publication Number Publication Date
JPS5266755U true JPS5266755U (nl) 1977-05-17
JPS5426356Y2 JPS5426356Y2 (nl) 1979-08-31

Family

ID=28632741

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15347575U Expired JPS5426356Y2 (nl) 1975-11-13 1975-11-13

Country Status (1)

Country Link
JP (1) JPS5426356Y2 (nl)

Also Published As

Publication number Publication date
JPS5426356Y2 (nl) 1979-08-31

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