JPS5266755U - - Google Patents

Info

Publication number
JPS5266755U
JPS5266755U JP15347575U JP15347575U JPS5266755U JP S5266755 U JPS5266755 U JP S5266755U JP 15347575 U JP15347575 U JP 15347575U JP 15347575 U JP15347575 U JP 15347575U JP S5266755 U JPS5266755 U JP S5266755U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15347575U
Other languages
Japanese (ja)
Other versions
JPS5426356Y2 (en:Method
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15347575U priority Critical patent/JPS5426356Y2/ja
Publication of JPS5266755U publication Critical patent/JPS5266755U/ja
Application granted granted Critical
Publication of JPS5426356Y2 publication Critical patent/JPS5426356Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP15347575U 1975-11-13 1975-11-13 Expired JPS5426356Y2 (en:Method)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15347575U JPS5426356Y2 (en:Method) 1975-11-13 1975-11-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15347575U JPS5426356Y2 (en:Method) 1975-11-13 1975-11-13

Publications (2)

Publication Number Publication Date
JPS5266755U true JPS5266755U (en:Method) 1977-05-17
JPS5426356Y2 JPS5426356Y2 (en:Method) 1979-08-31

Family

ID=28632741

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15347575U Expired JPS5426356Y2 (en:Method) 1975-11-13 1975-11-13

Country Status (1)

Country Link
JP (1) JPS5426356Y2 (en:Method)

Also Published As

Publication number Publication date
JPS5426356Y2 (en:Method) 1979-08-31

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