JPS5266754U - - Google Patents

Info

Publication number
JPS5266754U
JPS5266754U JP15302475U JP15302475U JPS5266754U JP S5266754 U JPS5266754 U JP S5266754U JP 15302475 U JP15302475 U JP 15302475U JP 15302475 U JP15302475 U JP 15302475U JP S5266754 U JPS5266754 U JP S5266754U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15302475U
Other languages
Japanese (ja)
Other versions
JPS5426355Y2 (nl
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15302475U priority Critical patent/JPS5426355Y2/ja
Publication of JPS5266754U publication Critical patent/JPS5266754U/ja
Application granted granted Critical
Publication of JPS5426355Y2 publication Critical patent/JPS5426355Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP15302475U 1975-11-12 1975-11-12 Expired JPS5426355Y2 (nl)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15302475U JPS5426355Y2 (nl) 1975-11-12 1975-11-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15302475U JPS5426355Y2 (nl) 1975-11-12 1975-11-12

Publications (2)

Publication Number Publication Date
JPS5266754U true JPS5266754U (nl) 1977-05-17
JPS5426355Y2 JPS5426355Y2 (nl) 1979-08-31

Family

ID=28632313

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15302475U Expired JPS5426355Y2 (nl) 1975-11-12 1975-11-12

Country Status (1)

Country Link
JP (1) JPS5426355Y2 (nl)

Also Published As

Publication number Publication date
JPS5426355Y2 (nl) 1979-08-31

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