JPS5266754U - - Google Patents

Info

Publication number
JPS5266754U
JPS5266754U JP15302475U JP15302475U JPS5266754U JP S5266754 U JPS5266754 U JP S5266754U JP 15302475 U JP15302475 U JP 15302475U JP 15302475 U JP15302475 U JP 15302475U JP S5266754 U JPS5266754 U JP S5266754U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15302475U
Other languages
Japanese (ja)
Other versions
JPS5426355Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15302475U priority Critical patent/JPS5426355Y2/ja
Publication of JPS5266754U publication Critical patent/JPS5266754U/ja
Application granted granted Critical
Publication of JPS5426355Y2 publication Critical patent/JPS5426355Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP15302475U 1975-11-12 1975-11-12 Expired JPS5426355Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15302475U JPS5426355Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1975-11-12 1975-11-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15302475U JPS5426355Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1975-11-12 1975-11-12

Publications (2)

Publication Number Publication Date
JPS5266754U true JPS5266754U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1977-05-17
JPS5426355Y2 JPS5426355Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1979-08-31

Family

ID=28632313

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15302475U Expired JPS5426355Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1975-11-12 1975-11-12

Country Status (1)

Country Link
JP (1) JPS5426355Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Also Published As

Publication number Publication date
JPS5426355Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1979-08-31

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