JPS5266148A - Sticking tool - Google Patents

Sticking tool

Info

Publication number
JPS5266148A
JPS5266148A JP14165575A JP14165575A JPS5266148A JP S5266148 A JPS5266148 A JP S5266148A JP 14165575 A JP14165575 A JP 14165575A JP 14165575 A JP14165575 A JP 14165575A JP S5266148 A JPS5266148 A JP S5266148A
Authority
JP
Japan
Prior art keywords
sticking tool
sticked
substance
improve
sticking
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14165575A
Other languages
Japanese (ja)
Inventor
Osamu Tachibana
Minoru Sakurai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP14165575A priority Critical patent/JPS5266148A/en
Publication of JPS5266148A publication Critical patent/JPS5266148A/en
Pending legal-status Critical Current

Links

Landscapes

  • Manipulator (AREA)

Abstract

PURPOSE: A sticking tool such as a silicone element planned to improve the sticking rate of a sticked substance and to improve the preciseness of aloading of a sticked substance by forming a stick hollow in many steps with a decreasing extension angle at an inner step.
COPYRIGHT: (C)1977,JPO&Japio
JP14165575A 1975-11-28 1975-11-28 Sticking tool Pending JPS5266148A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14165575A JPS5266148A (en) 1975-11-28 1975-11-28 Sticking tool

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14165575A JPS5266148A (en) 1975-11-28 1975-11-28 Sticking tool

Publications (1)

Publication Number Publication Date
JPS5266148A true JPS5266148A (en) 1977-06-01

Family

ID=15297083

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14165575A Pending JPS5266148A (en) 1975-11-28 1975-11-28 Sticking tool

Country Status (1)

Country Link
JP (1) JPS5266148A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5516125A (en) * 1994-11-30 1996-05-14 Texas Instruments Incorporated Baffled collet for vacuum pick-up of a semiconductor die

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5010561A (en) * 1973-05-25 1975-02-03

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5010561A (en) * 1973-05-25 1975-02-03

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5516125A (en) * 1994-11-30 1996-05-14 Texas Instruments Incorporated Baffled collet for vacuum pick-up of a semiconductor die
EP0715340A3 (en) * 1994-11-30 1998-02-04 Texas Instruments Incorporated Improvements in or relating to semiconductor processing

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