JPS5265673A - Photomask and method of manufacture thereof - Google Patents

Photomask and method of manufacture thereof

Info

Publication number
JPS5265673A
JPS5265673A JP14173475A JP14173475A JPS5265673A JP S5265673 A JPS5265673 A JP S5265673A JP 14173475 A JP14173475 A JP 14173475A JP 14173475 A JP14173475 A JP 14173475A JP S5265673 A JPS5265673 A JP S5265673A
Authority
JP
Japan
Prior art keywords
photomask
manufacture
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14173475A
Other languages
Japanese (ja)
Inventor
Satoru Matsumoto
Akira Kanaki
Susumu Tanida
Yasunori Hayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dai Nippon Printing Co Ltd
Original Assignee
Dai Nippon Printing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dai Nippon Printing Co Ltd filed Critical Dai Nippon Printing Co Ltd
Priority to JP14173475A priority Critical patent/JPS5265673A/en
Publication of JPS5265673A publication Critical patent/JPS5265673A/en
Pending legal-status Critical Current

Links

Landscapes

  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP14173475A 1975-11-26 1975-11-26 Photomask and method of manufacture thereof Pending JPS5265673A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14173475A JPS5265673A (en) 1975-11-26 1975-11-26 Photomask and method of manufacture thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14173475A JPS5265673A (en) 1975-11-26 1975-11-26 Photomask and method of manufacture thereof

Publications (1)

Publication Number Publication Date
JPS5265673A true JPS5265673A (en) 1977-05-31

Family

ID=15298955

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14173475A Pending JPS5265673A (en) 1975-11-26 1975-11-26 Photomask and method of manufacture thereof

Country Status (1)

Country Link
JP (1) JPS5265673A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55146928A (en) * 1979-05-02 1980-11-15 Ulvac Corp Manufacturing of photomask substrate
JPS6033555A (en) * 1983-08-04 1985-02-20 Konishiroku Photo Ind Co Ltd Material of mask for dry etching
JPS60107651A (en) * 1983-11-17 1985-06-13 Arubatsuku Seimaku Kk Photomask

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55146928A (en) * 1979-05-02 1980-11-15 Ulvac Corp Manufacturing of photomask substrate
JPS6055827B2 (en) * 1979-05-02 1985-12-06 日本真空技術株式会社 Photomask substrate processing method
JPS6033555A (en) * 1983-08-04 1985-02-20 Konishiroku Photo Ind Co Ltd Material of mask for dry etching
JPH0444735B2 (en) * 1983-08-04 1992-07-22 Konishiroku Photo Ind
JPS60107651A (en) * 1983-11-17 1985-06-13 Arubatsuku Seimaku Kk Photomask

Similar Documents

Publication Publication Date Title
JPS525271A (en) Method of manufacturing mask
JPS52952A (en) Imitation granite and method of manufacture
JPS5215955A (en) Multiivvpulley and method of producing same
ZA762947B (en) Beam construction and method of manufacture
JPS523199A (en) Segment magnet and method of manufacture thereof
JPS5283228A (en) Method of forming selffsupport type mask
JPS5251319A (en) Fluorised products and method of manufacture
JPS51119305A (en) Bricket and method of producing same
JPS52222A (en) Method of manufacturing alpha hydroxyisobutylamide
JPS52126178A (en) Photomask and method of manufacture thereof
YU173376A (en) 3-oxime-esters of d-17-ethylene-19-nortestosterone and process for the manufacture thereof
ZA76460B (en) Substituted benzodiazepin-10-ones and method of use
JPS51117200A (en) Alkaliibetaaalumina material and method of producing same
JPS5228266A (en) Semiconductor element and method of manufacture thereof
JPS5212118A (en) Production of bicynalhydroester and bicynaldiester
JPS5272530A (en) Multiinozzle wefer and method of fabricating same
JPS51115553A (en) Viscosityyadjusted masterbatch and method of manufacture
ZA76311B (en) Improved pipe and method of forming same
JPS52110728A (en) Process for manufacture of 33deoxyanthocycnidin and flavone
JPS5219623A (en) Nitryle and method of its preparation
PH12074A (en) Diarylbutanolamines and method of use thereof
JPS5230094A (en) Bandage and method of manufacturing same
GB1549638A (en) Roll section and method of manufacture thereof
JPS51122892A (en) Method of manufacturing files and files
JPS5219146A (en) Method of manufacture of metallclad material