JPS526554B1 - - Google Patents
Info
- Publication number
- JPS526554B1 JPS526554B1 JP1562171A JP1562171A JPS526554B1 JP S526554 B1 JPS526554 B1 JP S526554B1 JP 1562171 A JP1562171 A JP 1562171A JP 1562171 A JP1562171 A JP 1562171A JP S526554 B1 JPS526554 B1 JP S526554B1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1562171A JPS526554B1 (zh) | 1971-03-18 | 1971-03-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1562171A JPS526554B1 (zh) | 1971-03-18 | 1971-03-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS526554B1 true JPS526554B1 (zh) | 1977-02-23 |
Family
ID=11893765
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1562171A Pending JPS526554B1 (zh) | 1971-03-18 | 1971-03-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS526554B1 (zh) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5782713U (zh) * | 1980-11-11 | 1982-05-21 | ||
| US11331767B2 (en) | 2019-02-01 | 2022-05-17 | Micron Technology, Inc. | Pads for chemical mechanical planarization tools, chemical mechanical planarization tools, and related methods |
-
1971
- 1971-03-18 JP JP1562171A patent/JPS526554B1/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5782713U (zh) * | 1980-11-11 | 1982-05-21 | ||
| US11331767B2 (en) | 2019-02-01 | 2022-05-17 | Micron Technology, Inc. | Pads for chemical mechanical planarization tools, chemical mechanical planarization tools, and related methods |