JPS5265328A - Vaporizing burner - Google Patents

Vaporizing burner

Info

Publication number
JPS5265328A
JPS5265328A JP14119475A JP14119475A JPS5265328A JP S5265328 A JPS5265328 A JP S5265328A JP 14119475 A JP14119475 A JP 14119475A JP 14119475 A JP14119475 A JP 14119475A JP S5265328 A JPS5265328 A JP S5265328A
Authority
JP
Japan
Prior art keywords
vaporizing burner
vaporizing
burner
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14119475A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5526365B2 (oth
Inventor
Kingo Miyahara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dowa KK
Original Assignee
Dowa KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dowa KK filed Critical Dowa KK
Priority to JP14119475A priority Critical patent/JPS5265328A/ja
Publication of JPS5265328A publication Critical patent/JPS5265328A/ja
Publication of JPS5526365B2 publication Critical patent/JPS5526365B2/ja
Granted legal-status Critical Current

Links

JP14119475A 1975-11-27 1975-11-27 Vaporizing burner Granted JPS5265328A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14119475A JPS5265328A (en) 1975-11-27 1975-11-27 Vaporizing burner

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14119475A JPS5265328A (en) 1975-11-27 1975-11-27 Vaporizing burner

Publications (2)

Publication Number Publication Date
JPS5265328A true JPS5265328A (en) 1977-05-30
JPS5526365B2 JPS5526365B2 (oth) 1980-07-12

Family

ID=15286335

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14119475A Granted JPS5265328A (en) 1975-11-27 1975-11-27 Vaporizing burner

Country Status (1)

Country Link
JP (1) JPS5265328A (oth)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102816838B1 (ko) * 2024-01-10 2025-06-04 조동주 반도체 식각장비용 캐리어 플레이트 제조방법

Also Published As

Publication number Publication date
JPS5526365B2 (oth) 1980-07-12

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