JPS526141B2 - - Google Patents
Info
- Publication number
- JPS526141B2 JPS526141B2 JP47108584A JP10858472A JPS526141B2 JP S526141 B2 JPS526141 B2 JP S526141B2 JP 47108584 A JP47108584 A JP 47108584A JP 10858472 A JP10858472 A JP 10858472A JP S526141 B2 JPS526141 B2 JP S526141B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP47108584A JPS526141B2 (en:Method) | 1972-10-30 | 1972-10-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP47108584A JPS526141B2 (en:Method) | 1972-10-30 | 1972-10-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4966062A JPS4966062A (en:Method) | 1974-06-26 |
| JPS526141B2 true JPS526141B2 (en:Method) | 1977-02-19 |
Family
ID=14488502
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP47108584A Expired JPS526141B2 (en:Method) | 1972-10-30 | 1972-10-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS526141B2 (en:Method) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5279757A (en) * | 1975-12-26 | 1977-07-05 | Hitachi Ltd | Power supply for field emission electron gun |
| WO2024247022A1 (ja) * | 2023-05-29 | 2024-12-05 | 株式会社日立ハイテク | 荷電粒子線装置 |
-
1972
- 1972-10-30 JP JP47108584A patent/JPS526141B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4966062A (en:Method) | 1974-06-26 |