JPS5259898A - Manufacture of dielectric film - Google Patents
Manufacture of dielectric filmInfo
- Publication number
- JPS5259898A JPS5259898A JP50135803A JP13580375A JPS5259898A JP S5259898 A JPS5259898 A JP S5259898A JP 50135803 A JP50135803 A JP 50135803A JP 13580375 A JP13580375 A JP 13580375A JP S5259898 A JPS5259898 A JP S5259898A
- Authority
- JP
- Japan
- Prior art keywords
- dielectric film
- manufacture
- oxide
- phospho
- bismuth oxide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 229910000416 bismuth oxide Inorganic materials 0.000 abstract 2
- TYIXMATWDRGMPF-UHFFFAOYSA-N dibismuth;oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[Bi+3].[Bi+3] TYIXMATWDRGMPF-UHFFFAOYSA-N 0.000 abstract 2
- YWEUIGNSBFLMFL-UHFFFAOYSA-N diphosphonate Chemical compound O=P(=O)OP(=O)=O YWEUIGNSBFLMFL-UHFFFAOYSA-N 0.000 abstract 2
- 238000001704 evaporation Methods 0.000 abstract 1
Landscapes
- Inorganic Insulating Materials (AREA)
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
- Compositions Of Oxide Ceramics (AREA)
- Inorganic Compounds Of Heavy Metals (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP50135803A JPS5259898A (en) | 1975-11-11 | 1975-11-11 | Manufacture of dielectric film |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP50135803A JPS5259898A (en) | 1975-11-11 | 1975-11-11 | Manufacture of dielectric film |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5259898A true JPS5259898A (en) | 1977-05-17 |
| JPS5629801B2 JPS5629801B2 (enrdf_load_stackoverflow) | 1981-07-10 |
Family
ID=15160174
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP50135803A Granted JPS5259898A (en) | 1975-11-11 | 1975-11-11 | Manufacture of dielectric film |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5259898A (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61149270U (enrdf_load_stackoverflow) * | 1985-03-06 | 1986-09-13 |
-
1975
- 1975-11-11 JP JP50135803A patent/JPS5259898A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5629801B2 (enrdf_load_stackoverflow) | 1981-07-10 |
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