JPS5259312A - Regenerating method of hydrogen exhaust pumps - Google Patents

Regenerating method of hydrogen exhaust pumps

Info

Publication number
JPS5259312A
JPS5259312A JP13610575A JP13610575A JPS5259312A JP S5259312 A JPS5259312 A JP S5259312A JP 13610575 A JP13610575 A JP 13610575A JP 13610575 A JP13610575 A JP 13610575A JP S5259312 A JPS5259312 A JP S5259312A
Authority
JP
Japan
Prior art keywords
hydrogen exhaust
regenerating method
exhaust pumps
pumps
regenerating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13610575A
Other languages
English (en)
Japanese (ja)
Other versions
JPS567520B2 (enrdf_load_stackoverflow
Inventor
Kousuke Okamoto
Yukio Ishibe
Tetsuo Kurisaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokuda Seisakusho Co Ltd
RIKEN
Original Assignee
Tokuda Seisakusho Co Ltd
RIKEN
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokuda Seisakusho Co Ltd, RIKEN filed Critical Tokuda Seisakusho Co Ltd
Priority to JP13610575A priority Critical patent/JPS5259312A/ja
Publication of JPS5259312A publication Critical patent/JPS5259312A/ja
Publication of JPS567520B2 publication Critical patent/JPS567520B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP13610575A 1975-11-12 1975-11-12 Regenerating method of hydrogen exhaust pumps Granted JPS5259312A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13610575A JPS5259312A (en) 1975-11-12 1975-11-12 Regenerating method of hydrogen exhaust pumps

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13610575A JPS5259312A (en) 1975-11-12 1975-11-12 Regenerating method of hydrogen exhaust pumps

Publications (2)

Publication Number Publication Date
JPS5259312A true JPS5259312A (en) 1977-05-16
JPS567520B2 JPS567520B2 (enrdf_load_stackoverflow) 1981-02-18

Family

ID=15167384

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13610575A Granted JPS5259312A (en) 1975-11-12 1975-11-12 Regenerating method of hydrogen exhaust pumps

Country Status (1)

Country Link
JP (1) JPS5259312A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS567520B2 (enrdf_load_stackoverflow) 1981-02-18

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