JPS5259117A - Process for preparation of halogenosilane - Google Patents

Process for preparation of halogenosilane

Info

Publication number
JPS5259117A
JPS5259117A JP13490075A JP13490075A JPS5259117A JP S5259117 A JPS5259117 A JP S5259117A JP 13490075 A JP13490075 A JP 13490075A JP 13490075 A JP13490075 A JP 13490075A JP S5259117 A JPS5259117 A JP S5259117A
Authority
JP
Japan
Prior art keywords
halogenosilane
preparation
hexaalkylphosphotriamide
alkoxydilane
halogenosilanes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13490075A
Other languages
English (en)
Inventor
Norio Shinohara
Masatoshi Arai
Seiji Ichinohe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Chemical Co Ltd
Original Assignee
Shin Etsu Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Chemical Co Ltd filed Critical Shin Etsu Chemical Co Ltd
Priority to JP13490075A priority Critical patent/JPS5259117A/ja
Publication of JPS5259117A publication Critical patent/JPS5259117A/ja
Pending legal-status Critical Current

Links

JP13490075A 1975-11-10 1975-11-10 Process for preparation of halogenosilane Pending JPS5259117A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13490075A JPS5259117A (en) 1975-11-10 1975-11-10 Process for preparation of halogenosilane

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13490075A JPS5259117A (en) 1975-11-10 1975-11-10 Process for preparation of halogenosilane

Publications (1)

Publication Number Publication Date
JPS5259117A true JPS5259117A (en) 1977-05-16

Family

ID=15139135

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13490075A Pending JPS5259117A (en) 1975-11-10 1975-11-10 Process for preparation of halogenosilane

Country Status (1)

Country Link
JP (1) JPS5259117A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6335584A (ja) * 1985-07-31 1988-02-16 デイナミ−ト・ノ−ベル・アクチエンゲゼルシヤフト 珪素の部分エステルハロゲン化物の製造法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2226265A1 (de) * 1972-05-30 1973-12-13 Dynamit Nobel Ag Verfahren zur herstellung von niederen silanen und silanestern

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2226265A1 (de) * 1972-05-30 1973-12-13 Dynamit Nobel Ag Verfahren zur herstellung von niederen silanen und silanestern

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6335584A (ja) * 1985-07-31 1988-02-16 デイナミ−ト・ノ−ベル・アクチエンゲゼルシヤフト 珪素の部分エステルハロゲン化物の製造法

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